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UF190B-200A maintenance manual

时间:2014-08-19 21:08来源:www.ictest8.com 作者:ictest8 点击:
CONTENTS
List of CAUTION/ WARNING DANGER LABELS.........................................................L-1
1 External View ................................................................................................................1-1/3
1.1 Appearance .................................................................................................................................1-1/3
1.2 Main Components .......................................................................................................................1-3/3
2 Pre-Operation Check .....................................................................................................2-1/2
2.1 Preparations ...............................................................................................................................2-1/2
2.2 Checking Items...........................................................................................................................2-1/2
2.3 Main Circuit Breaker Specifications ..........................................................................................2-2/2
3 Parts Replacement Procedure ......................................................................................3-1/3
3.1 Replacement of Fan Motor..........................................................................................................3-1/3
3.1.1 Replacement of Control Rack Fan Motor............................................................................3-2/3
3.1.2 Replacement of Prober Main Body Fan Motor ...................................................................3-3/3
4 Adjustment...................................................................................................................4-1/22
4.1 Adjustment of Servo Driver ......................................................................................................4-1/22
4.2 Adjustment of Displacement Sensor ......................................................................................4-15/22
4.3 Adjustment of Wafer Sensor...................................................................................................4-17/22
4.4 Adjustment of Overhang Sensor.............................................................................................4-18/22
4.5 Adjustment of Wafer Center Sensors .....................................................................................4-20/23
4.6 Adjustment of LCD display condition ....................................................................................4-22/22
5 Electrical Units...........................................................................................................................5-1/24
5.1 Electrical Units Location ..........................................................................................................5-1/24
5.2 Machine Rear ............................................................................................................................5-2/24
5.3 Location Inside the Control Rack .............................................................................................5-3/24
5.4 Loader Electrical Components..................................................................................................5-4/24
5.4.1 Loader Board / Motor Drivers............................................................................................5-4/24
5.4.2 5AX DRV (FA0138B)SW1..................................................................................................5-5/24
5.5 VME RACK Board Location......................................................................................................5-6/24
5.6 Power Supply............................................................................................................................5-7/24
5.7 Fuses .........................................................................................................................................5-9/24
5.8 Display Unit............................................................................................................................5-10/24
5.9 Specifications of LCD Display.................................................................................................5-11/24
5.10 CCD CAMERA.......................................................................................................................5-13/24
5.11 FDD, HDD and MOD ............................................................................................................5-14/24
5.12 Thermal Printer ....................................................................................................................5-15/24
5.13 Heat-Up Unit.........................................................................................................................5-19/24
5.14 Temperature Controller ........................................................................................................5-22/24
6 Safety Measures.............................................................................................................6-1/6
6.1 EMO ( EMERGENCY POWER OFF )........................................................................................6-1/6
6.2 Interlock Configuration...............................................................................................................6-4/6
6.3 Lockout Device Setting (Lock out Configuration)......................................................................6-6/6
7 Maintenance Parts List.................................................................................................7-1/6
7.1 Rank A Parts ...............................................................................................................................7-1/6
7.2 Rank B Parts ...............................................................................................................................7-2/6
7.3 Rank C Parts ...............................................................................................................................7-3/6
7.4 Rank C Parts – Boards................................................................................................................7-5/6
7.5 Rank C Parts – Option Boards ...................................................................................................7-6/6
8 Troubleshooting ...........................................................................................................8-1/25
9 Troubleshooting Flowchart ...........................................................................................9-1/3
10 Circuit Diagrams ..................................................................................................... 10-1/35



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