 01-Introduction MEMS - A Toolbox for Miniaturization (Holden Li, NYTU) 02-Piezoresistive Sensors ‐Principles, Materials, Fabrication and Applications (Holden Li, NYTU) 03-Mechanics and Capacitive Sensors (Holden Li, NYTU) 04-Electrostatic Actuators (Holden Li, NYTU) 05-Thermal MEMS - Sensors and Actuators (Holden Li, NYTU) 06-Piezoelectric MEMS - Sensors and Actuators (Holden Li, NYTU) 07-MEMS Microfabrication - Introduction (Holden Li, NYTU) 08-MEMS Microfabrication - Bulk Micromachining (Holden Li, NYTU) 09-MEMS Microfabrication - Surface Micromachining (Holden Li, NYTU) 10-Packaging of MEMS (Holden Li, NYTU) 11-MEMS Testing and Reliability (Holden Li, NYTU)                    
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